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Inficon – Gemini MxG5xx
Advantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
Related products
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Inficon – Trigon BPG552
Read moreAdvantages
- Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Pirani interlock protection to avoid premature filament burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to BPG402
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – PGE300
Read moreAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 1 set point and 3 selectable analog output signals
- Bright digital LED display features a user friendly for calibration and operation
- 3 optional analog output signals (user selectable)
- Factory pre-set analog output signal or selectable via user interface
- Factory pre-set display units or selectable via user interface
- User programmable set point relays
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) and ideal device forupgrading your installed thermocouple gauges (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control from low to the high vacuum range
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Inficon – PGE500 DeviceNet
Read moreAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, and digital DeviceNet interface
- Bright digital OLED display with keypad for simple setup, calibration and operation
- Factory pre-set display units for measure or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament or platinum filament for corrosive applications
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Field replaceable spare sensor units
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop-in plug-compatible replacement for the DeviceNet versions of MKS / Granville-Phillips® Mini-Convectron® (GP275 Modules) Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
-
Inficon – PGE500 RS485/ Analog
Read moreAdvantages
- Convection Enhanced Pirani Technology for wide measurement range and higher accuracy near atmosphere
- All-in-One active gauge with built-in display, 2 set points, 4 analog output signals, and 2 digital interfaces
- Bright digital OLED display with keypad for simple setup, calibration and operation
- 4 optional analog output signals (3 user selectable, 1 Default)
- Factory pre-set analog output signal or selectable via keypad
- Factory pre-set display units or selectable via keypad
- User programmable set point relays (factory pre-set on request for volume orders)
- Gold plated tungsten filament
- Mechanical strength, highly robust and less susceptible to mechanical shock and vibration
- Choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces most Granville-Phillips® Mini-Convectron® modules (GP275) (Granville-Phillips® and Mini-Convectron® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Fore vacuum pressure measurement
- General vacuum measurement and control form low to the high vacuum range
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Inficon – SK CDG025D
Read moreAdvantages
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- One pushbutton zero function
- Wide range power supply
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
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