Only logged in customers who have purchased this product may leave a review.
Inficon – Edge CDG100D2
Advantages
- Compact, saves valuable tool space
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
CVD, Etch, PVD and other semiconductor production processes
Related products
-
Inficon – PPG550
Read moreAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Compliance & standards: CE, EN, UL, CSA, RoHS
- Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Use in Analytical equipment/ mass spectrometers
- Physical vapor deposition
- Fore-line measurement
- Gas-backfilling
-
Inficon – HPG400
Read moreAdvantages
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
Typical applications
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
-
Inficon – BAG402
Read moreAdvantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – Gemini MxG5xx
Read moreAdvantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
-
Inficon – PCG55x
Read more- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
Reviews
There are no reviews yet.