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Inficon – PGD500
Advantages
- User selectable measurement unit (Pa, mbar or Torr)
- Compact bench top model design can be easily mounted in a panel or 19″ rack
- 0 to 10 V output signal from the gauge is available for use in PLC or with a chart recorder
- One free adjustable set point
- CE certified
Typical Applications
- Fore vacuum pressure measurement
- Pressure measurement on evacuation/filling stations for RAC applications
- Pressure measurement in light bulb production lines
- General vacuum measurement and control in the medium and rough vacuum range
Related products
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Inficon – Augent OPG550
Read moreAdvantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
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Inficon – PSG50x
Read moreAdvantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
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Inficon – PBR 260
Read moreAdvantages
- PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
- Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
- Maximum pressure applies to inert gases and temperatures of less then 55°C
- Highly accurate, excellent repeatability in the process range 10-8 … 10-2 mbar
- Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
- Long-life yttrium oxide coated iridium filament
- RoHS compliance
Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges
- Part number IGG27000 matches PT R27 000
- Part number IGG27001 matches PT R27 001
- Part number IGG27002 matches PT R27 00
Typical applications
- General pressure measurement in semiconductor and analytical process environment
- Optical and other industrial coating processes
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Inficon – PPG570
Read moreAdvantages
- Gas type independent above 2 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Atmospheric ambient pressure measurement
- Up to 3 solid state relays
- Versatile of mounting orientation – provides engineering freedom in tool design
- Selectable analog output signal for easy system integration
- Digital interfaces RS232/ RS485
- Able to direct drop in replace MKS901P “MicroPirani™ – and Piezo Loadlock Vacuum Pressure Transducer”.
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Semiconductor load-lock applications
- Use in Analytical equipment/ mass sepctrometers
- Physical vapor deposition
- Physical vapor deposition
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Inficon- TPG36x
Read moreAs multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr).
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