Inficon – SKY CDG025D-X3, 4-20mA

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  Inficon – Augent OPG550

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  Advantages

  • High speed leak detection allows chamber leak test
  • Increase of productivity and yield
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration
  • Compact design and small footprint
  • Reliable and fast start up

  Typical Applications

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and concentrations control

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  Inficon – PBR 260

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  Advantages

  • PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
  • Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
  • Maximum pressure applies to inert gases and temperatures of less then 55°C
  • Highly accurate, excellent repeatability in the process range 10^-8 … 10^-2 mbar
  • Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
  • Long-life yttrium oxide coated iridium filament
  • RoHS compliance

  Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges

  • Part number IGG27000 matches PT R27 000
  • Part number IGG27001 matches PT R27 001
  • Part number IGG27002 matches PT R27 00

  Typical applications

  • General pressure measurement in semiconductor and analytical process environment
  • Optical and other industrial coating processes

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  Inficon – PSG55x

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  Advantages

  • Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
  • Optional display, setpoints and digital interfaces
  • Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal and various plug versions for easy integration
  • Mounts in any orientation – provides engineering freedom in tool design
  • Diagnostic port on all versions
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  •  Fore vacuum pressure measurement
  •  Safety circuits in vacuum systems
  •  General vacuum measurement and control from low to the high vacuum range

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  Inficon – IRC081

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  • Operating and display solution for accurate vacuum pressure measurement
  • User control on all IRG080 gauge parameters set
  • Simple manual operation with 5 potentiometers
  • User Interface connection via USB-B port to PC
  • PC Software in LabVIEW^TM
  • Data log and parameter log functionality
  • External port for status and vacuum interlock

   

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  Inficon – Trigon BAG552

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  Advantages

  • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
  • 2 filaments for Bayard-Alpert system
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotateable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • RoHS compliance

  Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the high to ultra high vacuum range

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