Inficon – SKY CDG025D-X3

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  Inficon – BAG302

  Advantages

  • Wide measurement range from 1.3 × 10^-9 to 6.7×10^-2 mbar(1 × 10^-9 to 5 × 10^-2 Torr)
  • Two standard long-life yttrium oxide coated iridium filaments
  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
  • Bright digital OLED display with keypad for simple setup, operation and programming
  • User programmable set point relay
  • User programmable display units in mbar, Torr or Pa
  • User selectable Auto-ranging of emission current
  • Mechanical strength and ruggedness
  • Choice of various flange options
  • Easy to exchange sensing element
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips^® 354 Micro-Ion^® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips^® and Micro-Ion^® are registered trademarks of MKS Instruments, Andover, MA)

  Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

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  Inficon – IRC081

  • Operating and display solution for accurate vacuum pressure measurement
  • User control on all IRG080 gauge parameters set
  • Simple manual operation with 5 potentiometers
  • User Interface connection via USB-B port to PC
  • PC Software in LabVIEW^TM
  • Data log and parameter log functionality
  • External port for status and vacuum interlock

   

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  Inficon – Gemini MxG5xx

  Advantages

  • Long lifetime in harsh environments
  • Low magnetic stray field
  • Reliable fast ignition
  • Fastest maintenance – replaceable insert
  • Compact size – easy to integrate
  • Corrosion proof feed-through & sensor element
  • Selectable measuring current
  • 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
  • PROFINET, EtherCAT and RS232/ RS485 digital interace

  Typical applications

  • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
  • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
  • Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.

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  Inficon – PPG550

  Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration
  •  Digital interfaces RS232/ RS485
  • Compliance & standards: CE, EN, UL, CSA, RoHS
  • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ – Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA
  • Compliance & standards: CE, EN, UL, CSA, RoHS

  Typical applications

  • Use in Analytical equipment/ mass spectrometers
  • Physical vapor deposition
  • Fore-line measurement
  •  Gas-backfilling

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  Inficon – MPG40X

  Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10^-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

  Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

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