Advanced controller for process measurement and data recording
Inficon- TPG36x
$0.00
As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. They efficiently manage and log data across a comprehensive pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr).
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- Full scale ranges from 100 mTorr … 1000 Torr
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- One pushbutton zero function
- Wide range power supply
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
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Inficon – BCG450
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- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
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- General vacuum measurement and control on systems in the low to ultra high vacuum range
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Inficon – PSG50x
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- Easy push button ATM and HV adjustment
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- Aluminum housing
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- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
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- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
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Inficon – BAG402
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- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
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Typical applications
- Pressure measurement in semiconductor process and transfer chambers
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- General vacuum measurement and control in the low to ultra high vacuum range
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Inficon – Gemini MxG5xx
$0.00Add to cartAdvantages
- Long lifetime in harsh environments
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- Reliable fast ignition
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- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
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Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
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