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Inficon – PGE050
Advantages
- Convection enhanced Pirani technology for wide measurement range and higher accuracy near atmosphere
- Gold plated tungsten filament
- Mechanical robust and less susceptible to mechanical shock and vibration
- Large choice of flange options
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® Convectron® gauge sensor (same plug/ pinouts)
- PGE050 accepts Granville-Phillips® Convectron® controllers, cables and modules
- Ideal gauge sensor for upgrading your installed Pirani and thermocouple gauge
Typical applications
- General vacuum measurement and control from atmosphere to high vacuum range
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- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
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Inficon – Trigon BPG552
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- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
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- Backwards compatible to BPG402
- RoHS compliance
Typical applications
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Inficon – Augent OPG550
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- Reliable and fast start up
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- Chamber leak check, faster RoR (rate of rise) test
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- Real time end point control
- Gas type and concentrations control
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Inficon – Trigon BCG552
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- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
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