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Inficon – VGC50x
Advantages
- Simple operation with dot matrix menu guided display for parameter, sensor or general settings
- Very bright and clear Display for long distance Instrument read- out
- Bar graph display with setpoints’s or pressure vs. time display
- Data log and parameter log function with USB port (rear side) and USB stick (front side)
- Ethernet interface
- Firmware upgrade available online or with USB stick
- Two free definable setpoints per channel with adjustable hysteresis
- High Resolution – 16 bit A/D converter
- Automatic identification of the INFICON active gauges
- Programmable 0 to 10 V Chart Recorder Output with logarithmic/ linear characteristics for single gauge or gauge combination (only VGC502 and VGC503)
Related products
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Inficon – BAG302
Read moreAdvantages
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485) (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – BPG400
Read moreAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – Trigon BAG552
Read moreAdvantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
-
Inficon – BPG402-Sx
Read moreAdvantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
-
Inficon – PCG55x
Read more- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
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