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Model 30
$7,800.00
Model 30 – UV Collimated Lightsource
Standalone or integrated into any mask aligner or exposure system• Available with near, mid, or deep UV
- Mercury Arc and Mercury Xenon lamps
- Highly uniform beam at exposure plain
- Low collimation half angle
- Power up to 12.5 kw
- Pictured with optional stand
- Optional Single Level Tooling Module
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• Higher stability: equipped with
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algorithm.ensuring the accuracy
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• Humidity free selection:
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• High intelligence: USB data,
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UV-Litho-ACA
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- XY distance: 55mm
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TS580
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Model 32
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Model 800E
$87,990.00Add to cartModel 800E – Semi-Automated Mask Aligner for Front or Backside Mask Alignment
- 3-point automatic wafer leveling
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- One touch from standard view to wide angle view with
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- IR lamp kit available
- Optional UV LED upgrade
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